Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect
Nanofabrication through molding - ScienceDirect
Soft photomask lithography and droplet spreading nano-imprinting
Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect
Deep reactive ion etching of 'grass-free' widely-spaced periodic 2D arrays, using sacrificial structures - ScienceDirect
UV imprinting process: (a) placing PDMS mold and UV-curable
A) Mold fabrication by photolithography process: SU8 photoresist
Dielectric metasurfaces: From wavefront shaping to quantum platforms - ScienceDirect
Continuous roller nanoimprinting: next generation lithography
Continuous roller nanoimprinting: next generation lithography - Nanoscale (RSC Publishing) DOI:10.1039/D2NR06380H
Nanomaterials, Free Full-Text