Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

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Nanofabrication through molding - ScienceDirect

Soft photomask lithography and droplet spreading nano-imprinting

Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

Deep reactive ion etching of 'grass-free' widely-spaced periodic 2D arrays, using sacrificial structures - ScienceDirect

UV imprinting process: (a) placing PDMS mold and UV-curable

A) Mold fabrication by photolithography process: SU8 photoresist

Dielectric metasurfaces: From wavefront shaping to quantum platforms - ScienceDirect

Continuous roller nanoimprinting: next generation lithography

Continuous roller nanoimprinting: next generation lithography - Nanoscale (RSC Publishing) DOI:10.1039/D2NR06380H

Nanomaterials, Free Full-Text