Understanding Ultra Low-k Dielectric Films

Dielectric materials are of critical importance in the function of microelectronic devices. This article outlines why and the mechanical characterization of Ultra Low-k Dielectric Films.

PDF) Effect of low-frequency radio frequency on plasma-enhanced chemical vapor deposited ultra low-κ dielectric films for very large-scale integrated interconnects

Mechanical properties of low K films as function of dielectric constant.

Electronics, Free Full-Text

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Comparison of the electrical properties for various low- k dielectric

PDF] Porous Low-Dielectric-Constant Material for Semiconductor Microelectronics

Thin Film Transistors

Materials chemistry for low-k materials - ScienceDirect

Breaking The 2nm Barrier